layers.csv

The layers.csv file is a file where users can edit and modify layer information to their foundry.

Rules when filling the table:

  1. The NAME of the layers has to be all capitals.

  2. The number of LAYER has to be consistent with the description of PROCESS.

  3. The number of DATATYPE has to be consistent with the description of PURPOSE.

The file content format is as follows:

  • From foundry ( Users must check LAYER and DATATYPE with their foundry to match the CAD layer information)

LAYER

DATATYPE

NAME

DESCRIPTION

PROCESS

PROCESS_DESCRIPTION

PURPOSE

PURPOSE_DESCRIPTION

1

1

FWG_COR

Full Etch waveguide core

FWG

COR

Waveguide core

1

2

FWG_CLD

Full Etch waveguide cladding

FWG

Full etch

CLD

Waveguide cladding

1

4

FWG_TRE

Full Etch waveguide trench

FWG

Full etch

TRE

Waveguide trench

1

5

FWG_HOL

Full Etch waveguide hole lattice

FWG

HOL

Waveguide hole lattice

2

1

SWG_COR

Shallow Etch waveguide core

SWG

COR

Waveguide core

2

2

SWG_CLD

Shallow Etch waveguide cladding

SWG

Shallow etch

CLD

Waveguide cladding

2

4

SWG_TRE

Shallow Etch waveguide trench

SWG

Shallow etch

TRE

Waveguide trench

2

5

SWG_HOL

Shallow Etch waveguide hole lattice

SWG

Shallow etch

HOL

Waveguide hole lattice

3

1

MWG_COR

Medium Etch waveguide core

MWG

Medium etch

COR

Waveguide core

3

2

MWG_CLD

Medium Etch waveguide cladding

MWG

Medium etch

CLD

Waveguide cladding

3

4

MWG_TRE

Medium Etch waveguide trench

MWG

Medium etch

TRE

Waveguide trench

3

5

MWG_HOL

Medium Etch waveguide hole lattice

MWG

Medium etch

HOL

Waveguide hole lattice

20

3

NP_DRW

NP, for MOD slab, Ge etc.

NP

DRW

Drawing

21

3

PP_DRW

PP, for MOD slab, Ge etc.

PP

DRW

Drawing

23

3

N_DRW

N type light doping

N

N type light doping

DRW

Drawing

24

3

P_DRW

P type light doping

P

P type light doping

DRW

Drawing

25

3

N2_DRW

N2 type light doping 2

N2

DRW

Drawing

26

3

P2_DRW

P2 type light doping 2

P2

DRW

Drawing

27

3

NPP_DRW

N++ implement

NPP

DRW

Drawing

28

3

PPP_DRW

P++ implement

PPP

P++ implant

DRW

Drawing

29

3

GE_DRW

Germanium epitaxy

GE

DRW

Drawing

30

3

SIL_DRW

Silicide area

SIL

Silicide area

DRW

Drawing

31

3

TIN_DRW

TiN heater

TIN

DRW

Drawing

32

3

CONT_DRW

Contact

CONT

Contact

DRW

Drawing

33

3

M1_DRW

Metal 1

M1

DRW

Drawing

34

3

VIA1_DRW

Via 1 on M1

VIA1

DRW

Drawing

35

3

M2_DRW

Metal 2

M2

Metal 2

DRW

Drawing

36

3

VIA2_DRW

Via 2 on M2

VIA2

VIA2 on M2

DRW

Drawing

43

3

MT_DRW

Metal Top

MT

DRW

Drawing

50

11

PASS_EC

Passivation, open EC

PASS

EC

50

12

PASS_GC

Passivation, open GC

PASS

Passivation open window

GC

50

13

PASS_MT

Passivation, open MT

PASS

MT

51

3

TH_ISO_DRW

Thermal isolation

TH_ISO

Thermal isolation

DRW

Drawing

52

3

DT_DRW

Deep Trench for edge coupler

DT

Deep Trench for edge coupler

DRW

Drawing

55

3

LABEL_DRW

Label to print on FWG

LABEL

Label to print on FWG

DRW

Drawing

56

30

TEXT_NOTE

Text layer, not to print on wafer

TEXT

Text, not to print on wafer

NOTE

Note

81

3

M1KO_DRW

Tilling keep-out for M1

M1KO

Tilling keep-out for M1

DRW

Drawing

82

3

MTKO_DRW

Tilling keep-out for MT

MTKO

Tilling keep-out for MT

DRW

Drawing

83

3

SIKO_DRW

Tiliing keep-out for Silicon

SIKO

Tiliing keep-out for Silicon

DRW

Drawing

  • From PhotoCAD ( These layers are for testing, LVS, DRC and error mark when generating layout, we suggest users not to modify the information od these layers. However, if these layers’ LAYER and DATATYPE conflicts with the above layers, users are mandatory to modify them to another number.)

LAYER

DATATYPE

NAME

DESCRIPTION

PROCESS

PROCESS_DESCRIPTION

PURPOSE

PURPOSE_DESCRIPTION

60

21

IOPORT_OREC

Optical port, for testing

IOPORT

Port, for testing

OREC

Optical

60

22

IOPORT_EREC

Electrical port, for testing

IOPORT

Port, for testing

EREC

Electrical

70

30

PINREC_NOTE

Pin rectangle, for LVS, DRC

PINREC

Pin rectangle, for LVS, DRC

NOTE

Note

70

31

PINREC_FWG

Pin rectangle, for LVS, DRC

PINREC

Pin rectangle, for LVS, DRC

FWG

Full etch

70

32

PINREC_SWG

Pin rectangle, for LVS, DRC

PINREC

Pin rectangle, for LVS, DRC

SWG

Shallow etch

70

33

PINREC_MWG

Pin rectangle, for LVS, DRC

PINREC

Pin rectangle, for LVS, DRC

MWG

Medium etch

70

41

PINREC_TEXT

Pin rectangle, for LVS, DRC

PINREC

Pin rectangle, for LVS, DRC

TEXT

Text

71

30

FIBREC_NOTE

Fiber rectangle, for LVS, DRC

FIBREC

Fiber rectangle, for LVSS, DRC

NOTE

Note

72

30

FIBTGT_NOTE

Fiber Target for LVS

FIBTGT

Fiber Target for LVS

NOTE

Note

80

30

DEVREC_NOTE

Device rectangle, for LVS, DRC

DEVREC

Device rectangle, for LVS, DRC

NOTE

Note

90

30

PAYLOAD_NOTE

Design area

PAYLOAD

Design area

NOTE

Note

91

35

FLYLINE_MARK

Flyline for insufficient space in AutoLink

FLYLINE

Fly line

MARK

Mark

92

35

ERROR_MARK

Error mark

ERROR

Error

MARK

Mark